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High Power Impulse Magnetron Sputter Coating Machine

Model No.
DYHC-HiPIMS
Made in
Taiwan
Supplier
Dahyoung Vacuum Equipment Co.,Ltd
Request for Quotation

High Power Impulse Magnetron Sputtering (HiPIMS) is the innovative technology of PVD Coating.

Spec

  • Type : Hydraulic
  • Model : DYHC-HiPIMS

Key Features

Product Description

High Power Impulse Magnetron Sputtering (HiPIMS) is a high-power pulsed power supply system used on magnetron sputtering coating technics. Compared to the traditional DC sputtering system, HiPIMS could generate  tens of times higher pulsing current to obtain a ten thousand times higher-density electron plasma. Effectively enhancing-e  the ionization rate to obtain a non-porous, high density crystallinity film at lower coating temperatures.
DAH YOUNG's DYHC-H HiPIMS series sputtering coater power supply and chamber cavity are designed to provide, high plasma density (1018~19e-/m3) and high ionization rate (70~100%), increasing the substrate coating compactness. Hesion, flatness and corrosion resistance. The lower duty cycle (<5%) results in a significant reduction in process temperature more substrate options on PEN, PET, etc. fiexible substrates.



Specification

Model DYHC 1200 HiPIMS 
 Coating Substrate Metal, ceramic, enamel, glass, plastic
 Coating Technology HiPIMS high power pulsed magnetron sputtering
 Coating Materials Per customer requirements
 Coating Color Per customer requirements
 Chamber Material Stainless steel SUS304
 Operating system IPC and PLC automatic and manual control
 Chamber Diameter Ø1200mm 
 Chamber  Height H1200mm
 Number of Planetary Axis 6~12(Depending on the process)
 Effective Coating Diameter (mm) Ø960mm 
 Effective Coating Height (mm) H850mm
 Coating Deposition  Method HiPIMS magnetron sputtering coating and cathodic arc coating
 Number of sputtering sources 6
 Sputter power (kW) 20kW
 Ultimate vacuum (Torr) 5*10-6 Torr
 Power requirement 3 Phase/380V/170kW/50-60Hz

Application

Optoelectronics, Semiconductors, Energy, Machining, Molds, Biomedicine, Micro drill needle, etc. 

Features

  1. Fully automated control (IPC & PLC).
  2. Optional  coating deposition methods (Cathode Arc, Magnetron Sputtering, Ion Source, HiPIMS) could be implemented to meet the customers coating requirements.
  3. The low-position chamber cavity provides easy operator access.
  4. EU and CE  safety standards and technical specifications available.
  5. Features of PVD coating :
    • High abrasion resistance
    • Retains hardness under the high operating temperatures
    • High oxidation resistance
    • Low friction coefficient
    • Anti-adhesion
    • Scratch resistant
    • Various surface colors

Product Certification

Payment Details for Offline Orders

  • Payment Terms : TT
  • Minimum Order : 0 Piece(s)

Last Update : 2021-02-24
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Mr.Cash Chien , Dahyoung Vacuum Equipment Co.,Ltd

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